Key parameters of thin films, like their thickness and their dielectric function, i.e. their refractive index and extinction coefficient (including possible anisotropies of both), can be determined by variable-angle spectroscopic ellipsometry (VASE). Our new system from J.A. Woolam will cover the spectral range from 210 to 1690 nm and allow fully automated variation of the incident angle as well as scanning a 4-inch sample. In addition, the sample can be heated up to 300°C.

Contact person: Albin Cakaj